fig11
Figure 11. Configuration and structure of the robot. C1–C6 stand for the corresponding chambers. ECi stands for the ith end chamber. Reproduced with permission[6], Copyright 2018, IEEE.
Figure 11. Configuration and structure of the robot. C1–C6 stand for the corresponding chambers. ECi stands for the ith end chamber. Reproduced with permission[6], Copyright 2018, IEEE.
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