fig9
Figure 9. Schematic illustration of the HMI consisting of a MEMS bulk wave resonant humidity sensor and a triboelectric sensor[108]. HMI: Human-machine interfaces; MEMS: Microelectromechanical system.
Figure 9. Schematic illustration of the HMI consisting of a MEMS bulk wave resonant humidity sensor and a triboelectric sensor[108]. HMI: Human-machine interfaces; MEMS: Microelectromechanical system.
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