fig9
Figure 9. (A) The HRTEM and (B) EDS mappings of the TiN/ZrO2/HfO2/TiN capacitor[42]. Reprinted (adapted) with permission from Ref.[42]. Copyright (2022) American Chemical Society. (C) HZO/ZrO2 supercell[84]. Reprinted from Ref.[84], with permission from IOP Publishing. (D) Schematic of heterostructure[87]. Reprinted (adapted) with permission from Ref.[87]. Copyright (2022) American Chemical Society.
