fig7

Figure 7. The evolution of P_r in hafnium oxide thin films with different doping systems (including Zr^{[5,24,32,39,44,50-52,55-74]}, Y^[40,46-49], Si^[4], La^[44,54], Gd^[22,75], V^[53], La-HZO^[6], pure HfO₂^[76]) from 2011 to 2025.