fig1

Progress on hafnium oxide-based emerging ferroelectric materials and applications

Figure 1. (A) The formation of the orthorhombic phase with a capping layer[4]. (B) An orthorhombic structure consisting of alternating spacer and ferroelectric layers[21]. Reprinted from Ref.[4], with permission from AIP Publishing. Reprinted from Ref.[21], with permission from AAAS.

Microstructures
ISSN 2770-2995 (Online)

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