fig6

Figure 6. Illustration of the software’s template-based point detection performance for atoms with extremely weak signals. (A) Structure of anti-fluorite; (B) STEM image of the material and its structural schematic; (C) Point detection results obtained using Tempas, displaying missing peaks and superfluous peaks; (D) Effectiveness of template selection within the software; (E) Final point detection outcomes. STEM: Scanning transmission electron microscopy.