fig5
Figure 5. Ferroelectric switching characteristics and wake-up stability of HZO capacitors. P-E hysteresis loops were measured for HZO capacitors with (A) Mo, (B) 05MoN, (C) 52MoN, and (D) 79MoN electrodes. The loops compare the ferroelectric response in the pristine state and after wake-up field cycling (104 cycles at 3 MV∙cm-1 and 100 kHz). The evolution of ferroelectric parameters is summarized in (E) Double remanent polarization (2Pr) and (F) double coercive field (2Ec), for each electrode condition before and after cycling. HZO: Hf0.5Zr0.5O2; P-E: polarization-electric field.
