fig4

Progress in atomic layer deposition of metal oxides for efficient and stable perovskite solar cells

Figure 4. (A) O 1s core-level spectra from XPS analysis of Ta-doped PEALD-grown TiO2 thin films at varying bubbler temperatures[162]. Copyright 2021, MDPI. (B) Energy band diagram of ALD (A-)/solution(S-)/bilayer TiO2 ETL-based devices[163]. Copyright 2023, Elsevier. (C) ssPL spectra of A-/S-/bilayer TiO2 film[163]. Copyright 2023, Elsevier.

Microstructures
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