fig7

Figure 7. ABF-STEM micrograph showing the Pt/Al_0.74Sc_0.26N/Pt/GaN capacitor stack in cross-section. (A) The inset shows superimposed EDS maps of Pt, Al, and Ga. (B) Atomic structure sketches of M- and N-polar states. (C) Inverted ABF-STEM micrograph sketches of an inclined inversion domain boundary separating M-polar (upper right) and N-polar (lower left) regions, with overlaid (Al,Sc)-N dumbbell schematics indicating polarization direction. (D) Intensity profiles of polarization direction within individual (Al,Sc)-N dumbbells, with arrows indicating profile direction and color-coded polarity: M-polarity = pink, N-polarity = blue^[6].