fig5

Figure 5. Nanometric thickness, measured by FE-SEM, and atomic thickness, measured by RBS for the 800PA, Ti600PA and Ti800PA samples. FE-SEM: Field emission scanning electron microscopy; RBS: Rutherford backscattering spectrometry.
Figure 5. Nanometric thickness, measured by FE-SEM, and atomic thickness, measured by RBS for the 800PA, Ti600PA and Ti800PA samples. FE-SEM: Field emission scanning electron microscopy; RBS: Rutherford backscattering spectrometry.
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